Publication:

Design, fabrication and physical analysis of TiN/AlN deep UV photodiodes

Date

2010
Journal article
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dc.contributor.authorBarkad, H.A.
dc.contributor.authorSoltani, A.
dc.contributor.authorMattalah, M.
dc.contributor.authorGerbedoen, J.C.
dc.contributor.authorRousseau, M.
dc.contributor.authorde Jaeger, J.C.
dc.contributor.authorBenmoussa, A.
dc.contributor.authorMortet, Vincent
dc.contributor.authorHaenen, Ken
dc.contributor.authorBenbakhti, B.
dc.contributor.authorMoreau, M.
dc.contributor.authorDupuis, R.
dc.contributor.authorOugazzaden, A.
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-18T15:18:12Z
dc.date.available2021-10-18T15:18:12Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16707
dc.source.beginpage465104
dc.source.issue46
dc.source.journalJournal of Physics D: Applied Physics
dc.source.volume43
dc.title

Design, fabrication and physical analysis of TiN/AlN deep UV photodiodes

dc.typeJournal article
dspace.entity.typePublication
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