Publication:
Novel analog pulse-width-modulated 15-μm SiGe micromirrors
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2 since deposited on 2021-10-18
Acq. date: 2025-10-26
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1964 since deposited on 2021-10-18
Acq. date: 2025-10-26
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2 since deposited on 2021-10-18
Acq. date: 2025-10-26
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1964 since deposited on 2021-10-18
Acq. date: 2025-10-26
Citations