Novel analog pulse-width-modulated 15-μm SiGe micromirrors

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Authors

Beernaert, Roel; Avci, Aykut; De Smet, Jelle; De Smet, Herbert; De Coster, Jeroen; Witvrouw, Ann; Severi, Simone

ISSN

1071-0922

Issue

10

Journal

Journal of the Society for Information Display

Volume

18

Title

Novel analog pulse-width-modulated 15-μm SiGe micromirrors

Publication type

Journal article

Embargo date

9999-12-31

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