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Novel analog pulse-width-modulated 15-μm SiGe micromirrors

dc.contributor.authorBeernaert, Roel
dc.contributor.authorAvci, Aykut
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorDe Smet, Herbert
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.date.accessioned2021-10-18T15:19:07Z
dc.date.available2021-10-18T15:19:07Z
dc.date.issued2010
dc.identifier.issn1071-0922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16721
dc.sourceIIOimport
dc.titleNovel analog pulse-width-modulated 15-μm SiGe micromirrors
dc.typeJournal article
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorSeveri, Simone
dc.contributor.orcidimecDe Smet, Herbert::0000-0001-9640-8454
dc.contributor.orcidimecDe Coster, Jeroen::0000-0002-4893-0691
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage855
dc.source.endpage861
dc.source.journalJournal of the Society for Information Display
dc.source.issue10
dc.source.volume18
dc.identifier.urlhttp://dx.doi.org/10.1889/JSID18.10.855
imec.availabilityPublished - imec


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