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SiGe micromirrors for optical applications

dc.contributor.authorBeernaert, Roel
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorPodprocky, Tomas
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.contributor.authorAvci, Aykut
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorDe Smet, Herbert
dc.date.accessioned2021-10-18T15:19:11Z
dc.date.available2021-10-18T15:19:11Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16722
dc.sourceIIOimport
dc.titleSiGe micromirrors for optical applications
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Smet, Herbert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage77501S
dc.source.conferencePhotonics North 2010
dc.source.conferencedate1/06/2010
dc.source.conferencelocationNiagara Falls Canada
dc.identifier.urlhttp://dx.doi.org/10.1117/12.873061
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 7750


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