Publication:

Novel micromirror design with variable pull-in voltage

Date

2010
Journal article
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Author(s)

Beernaert, Roel
;
Podprocky, Tomas
;
De Coster, Jeroen  
;
Witvrouw, Ann
;
Haspeslagh, Luc  
;
Avci, Aykut
;
De Smet, Jelle
;
De Smet, Herbert  

Journal

Microelectronic Engineering

Abstract

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1931 since deposited on 2021-10-18
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