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Novel micromirror design with variable pull-in voltage

dc.contributor.authorBeernaert, Roel
dc.contributor.authorPodprocky, Tomas
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorAvci, Aykut
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorDe Smet, Herbert
dc.date.accessioned2021-10-18T15:19:16Z
dc.date.available2021-10-18T15:19:16Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16723
dc.sourceIIOimport
dc.titleNovel micromirror design with variable pull-in voltage
dc.typeJournal article
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Smet, Herbert
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1248
dc.source.endpage1252
dc.source.journalMicroelectronic Engineering
dc.source.issue5_8
dc.source.volume87
imec.availabilityPublished - open access
imec.internalnotesMNE 2009


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