dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Drijbooms, Chris | |
dc.contributor.author | Van Marcke, Patricia | |
dc.contributor.author | Geypen, Jef | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Favia, Paola | |
dc.date.accessioned | 2021-10-18T15:20:06Z | |
dc.date.available | 2021-10-18T15:20:06Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16733 | |
dc.source | IIOimport | |
dc.title | Structural analysis of TSVs | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Drijbooms, Chris | |
dc.contributor.imecauthor | Van Marcke, Patricia | |
dc.contributor.imecauthor | Geypen, Jef | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Favia, Paola | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
dc.source.peerreview | no | |
dc.source.conference | Europen Focused Ion Beam Users Group Meeting | |
dc.source.conferencedate | 11/10/2010 | |
dc.source.conferencelocation | Gaeta Italy | |
imec.availability | Published - imec | |