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Unbalanced RF magnetron sputtering of thin hexagonal boron nitride films

dc.contributor.authorBenMoussa, B.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorBorschel, C.
dc.contributor.authorSaitner, M.
dc.contributor.authorSoltani, A.
dc.contributor.authorMortet, Vincent
dc.contributor.authorRonning, C.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorBoyen, H.G.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-18T15:20:21Z
dc.date.available2021-10-18T15:20:21Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16736
dc.sourceIIOimport
dc.titleUnbalanced RF magnetron sputtering of thin hexagonal boron nitride films
dc.typeMeeting abstract
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conference4th International Conferenceon New Diamond and Nano Carbons - NDNC
dc.source.conferencedate16/05/2010
dc.source.conferencelocationSuzhou China
imec.availabilityPublished - imec


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