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Synthesis of hexagonal boron nitride by physical vapour deposition process

dc.contributor.authorBenMoussa, B.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorBorschel, C.
dc.contributor.authorSoltani, A.
dc.contributor.authorMortet, Vincent
dc.contributor.authorRonning, C.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorBoyen, H.G.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-18T15:20:26Z
dc.date.available2021-10-18T15:20:26Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16737
dc.sourceIIOimport
dc.titleSynthesis of hexagonal boron nitride by physical vapour deposition process
dc.typeMeeting abstract
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conference21st European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, and Nitrides
dc.source.conferencedate5/09/2010
dc.source.conferencelocationBudapest Hungary
imec.availabilityPublished - imec


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