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Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorDortu, Fabian
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorRosseel, Erik
dc.contributor.authorNguyen, Duy
dc.contributor.authorShaughnessy, Derrick
dc.contributor.authorSalnick, Alex
dc.contributor.authorNicolaides, Lena
dc.date.accessioned2021-10-18T15:23:19Z
dc.date.available2021-10-18T15:23:19Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16771
dc.sourceIIOimport
dc.titleNondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
dc.typeJournal article
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRosseel, Erik
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageC1C1
dc.source.endpageC1C7
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume28
imec.availabilityPublished - open access


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