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Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
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Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Dortu, Fabian
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Rosseel, Erik
;
Nguyen, Duy
;
Shaughnessy, Derrick
;
Salnick, Alex
;
Nicolaides, Lena
Journal
Journal of Vacuum Science and Technology B
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since deposited on 2021-10-18
Acq. date: 2025-12-10
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1935
since deposited on 2021-10-18
Acq. date: 2025-12-10
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Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-12-10
Views
1935
since deposited on 2021-10-18
Acq. date: 2025-12-10
Citations