Publication:

Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

Date

2010
Journal article
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dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorDortu, Fabian
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorRosseel, Erik
dc.contributor.authorNguyen, Duy
dc.contributor.authorShaughnessy, Derrick
dc.contributor.authorSalnick, Alex
dc.contributor.authorNicolaides, Lena
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRosseel, Erik
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned2021-10-18T15:23:19Z
dc.date.available2021-10-18T15:23:19Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16771
dc.source.beginpageC1C1
dc.source.endpageC1C7
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume28
dc.title

Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

dc.typeJournal article
dspace.entity.typePublication
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