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Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorDortu, Fabian
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSalnik, Alex
dc.date.accessioned2021-10-18T15:23:25Z
dc.date.available2021-10-18T15:23:25Z
dc.date.issued2010
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16772
dc.sourceIIOimport
dc.titleElectrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
dc.typeJournal article
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewyes
dc.source.beginpage104908
dc.source.journalJournal of Applied Physics
dc.source.issue10
dc.source.volume108
imec.availabilityPublished - imec


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