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dc.contributor.authorBrems, Steven
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorHauptmann, Marc
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorStruyf, Herbert
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-18T15:26:11Z
dc.date.available2021-10-18T15:26:11Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16798
dc.sourceIIOimport
dc.titleInfluence of gas type on ultrasound cleaning efficiency
dc.typeMeeting abstract
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage83
dc.source.conference20th International Congress on Acoustics - ICA
dc.source.conferencedate23/08/2010
dc.source.conferencelocationSydney Australia
imec.availabilityPublished - imec


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