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The analysis of ultra-thin films with HRBS-30

dc.contributor.authorBrijs, Bert
dc.contributor.authorKimura, Kenji
dc.contributor.authorSchiettekatte, Francois
dc.contributor.authorSajavaara, Timo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T15:26:39Z
dc.date.available2021-10-18T15:26:39Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16802
dc.sourceIIOimport
dc.titleThe analysis of ultra-thin films with HRBS-30
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference21st International Conference on the Application of Accelerators in Research and Industry - CAARI
dc.source.conferencedate8/08/2010
dc.source.conferencelocationFort Worth, TX USA
imec.availabilityPublished - imec
imec.internalnotesAIP Conference Proceedings


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