Authors

Bryce, George; Severi, Simone; Van Hoof, Rita; Guo, Bin; Kunnen, Eddy; Witvrouw, Ann; Decoutere, Stefaan

Conference

217th ECS Meeting

Title

Development, optimization and evaluation of a CF4 pre-treatment process to remove unwanted interfacial layers in stacks of CVD and PECVD polycrystalline silicon-germanium for MEMS applications

Publication type

Meeting abstract

Embargo date

9999-12-31