Issues and solutions for co-integration of Ge and IIIV MOSFETs for beyond 22 nm technology generation CMOS
dc.contributor.author | Caymax, Matty | |
dc.date.accessioned | 2021-10-18T15:30:30Z | |
dc.date.available | 2021-10-18T15:30:30Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16834 | |
dc.source | IIOimport | |
dc.title | Issues and solutions for co-integration of Ge and IIIV MOSFETs for beyond 22 nm technology generation CMOS | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.source.peerreview | no | |
dc.source.conference | UK Semiconductors | |
dc.source.conferencedate | 7/07/2010 | |
dc.source.conferencelocation | Sheffield UK | |
imec.availability | Published - imec |
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