Authors

Chang, K.S.; Green, M.L.; Levin, I.; Hattrick-Simpers, J.R.; Jaye, C.; Fischer, D.A.; Takeuchi, I.; De Gendt, Stefan

ISSN

0003-6951

Issue

19

Journal

Applied Physics Letters

Volume

96

Title

Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film

Publication type

Journal article

Embargo date

9999-12-31