Publication:
Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film
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1 since deposited on 2021-10-18
Acq. date: 2026-01-11
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1893 since deposited on 2021-10-18
Acq. date: 2026-01-11
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1 since deposited on 2021-10-18
Acq. date: 2026-01-11
Views
1893 since deposited on 2021-10-18
Acq. date: 2026-01-11
Citations