Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film

Publication:

2010

Journal article

Author(s)

Chang, K.S.

;

Green, M.L.

;

Levin, I.

;

Hattrick-Simpers, J.R.

;

Jaye, C.

;

Fischer, D.A.

;

Takeuchi, I.

;

Applied Physics Letters

1 since deposited on 2021-10-18

Acq. date: 2026-02-24

1893 since deposited on 2021-10-18

Acq. date: 2026-02-24