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Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film

dc.contributor.authorChang, K.S.
dc.contributor.authorGreen, M.L.
dc.contributor.authorLevin, I.
dc.contributor.authorHattrick-Simpers, J.R.
dc.contributor.authorJaye, C.
dc.contributor.authorFischer, D.A.
dc.contributor.authorTakeuchi, I.
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-18T15:31:12Z
dc.date.available2021-10-18T15:31:12Z
dc.date.issued2010
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16839
dc.sourceIIOimport
dc.titlePhysical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film
dc.typeJournal article
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage192114
dc.source.journalApplied Physics Letters
dc.source.issue19
dc.source.volume96
imec.availabilityPublished - imec


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