dc.contributor.author | Chang, Yao-Chung | |
dc.contributor.author | Merckling, Clement | |
dc.contributor.author | Penaud, Julien | |
dc.contributor.author | Lu, Chung-Yu | |
dc.contributor.author | Wang, Wei-E | |
dc.contributor.author | Dekoster, Johan | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Kwo, Raynien | |
dc.contributor.author | Hong, Minghwei | |
dc.date.accessioned | 2021-10-18T15:31:21Z | |
dc.date.available | 2021-10-18T15:31:21Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16840 | |
dc.source | IIOimport | |
dc.title | Effective reduction of interfacial traps in Al2O3 /GaAs(001) gate stacks using surface engineering and thermal annealing | |
dc.type | Journal article | |
dc.contributor.imecauthor | Merckling, Clement | |
dc.contributor.imecauthor | Dekoster, Johan | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Merckling, Clement::0000-0003-3084-2543 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 112901 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 11 | |
dc.source.volume | 97 | |
imec.availability | Published - open access | |