Authors

Chang, Yao-Chung; Merckling, Clement; Penaud, Julien; Lu, Chung-Yu; Wang, Wei-E; Dekoster, Johan; Meuris, Marc; Caymax, Matty; Heyns, Marc; Kwo, Raynien; Hong, Minghwei

ISSN

0003-6951

Issue

11

Journal

Applied Physics Letters

Volume

97

Title

Effective reduction of interfacial traps in Al2O3 /GaAs(001) gate stacks using surface engineering and thermal annealing

Publication type

Journal article

Embargo date

9999-12-31