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Integration and electrical characterization of carbon nanotube bundles for application as interconnects

dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorArstila, Kai
dc.contributor.authorLi, Yunlong
dc.contributor.authorCott, Daire
dc.contributor.authorRichard, Olivier
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-18T15:34:07Z
dc.date.available2021-10-18T15:34:07Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16859
dc.sourceIIOimport
dc.titleIntegration and electrical characterization of carbon nanotube bundles for application as interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate8/03/2010
dc.source.conferencelocationMechelen Belgium
dc.identifier.urlhttp://www.mam-conference.org/
imec.availabilityPublished - imec


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