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Integration and electrical characterization of carbon nanotubes bundles for application as vertical interconnects

dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorArstila, Kai
dc.contributor.authorRichard, Olivier
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-18T15:34:16Z
dc.date.available2021-10-18T15:34:16Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16860
dc.sourceIIOimport
dc.titleIntegration and electrical characterization of carbon nanotubes bundles for application as vertical interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewno
dc.source.conferenceEurocarbon Symposium
dc.source.conferencedate13/07/2010
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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