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Electrical resistivity and contact resistance in carbon nanotube vertical interconnects

dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorLi, Yunlong
dc.contributor.authorArstila, Kai
dc.contributor.authorRichard, Olivier
dc.contributor.authorCott, Daire
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-18T15:34:36Z
dc.date.available2021-10-18T15:34:36Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16862
dc.sourceIIOimport
dc.titleElectrical resistivity and contact resistance in carbon nanotube vertical interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewno
dc.source.beginpageB1.10
dc.source.conferenceMRS Fall meeting Symposium B: Carbon-Based Electronic Devices--Processing, Performance, and Reliability
dc.source.conferencedate29/11/2010
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


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