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Towards integrated microrelays using electromagnetic actuation

dc.contributor.authorZiad, Hocine
dc.contributor.authorDe Bruyker, Dirk
dc.contributor.authorChévrier, Jean-Baptiste
dc.contributor.authorBaert, Kris
dc.contributor.authorLöwe, H.
dc.contributor.authorTilmans, H.A.C.
dc.date.accessioned2021-09-29T15:58:38Z
dc.date.available2021-09-29T15:58:38Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1686
dc.sourceIIOimport
dc.titleTowards integrated microrelays using electromagnetic actuation
dc.typeProceedings paper
dc.contributor.imecauthorZiad, Hocine
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1193
dc.source.endpage1196
dc.source.conferenceProceedings Eurosensors X : The 10th European Conference on Solid-State Transducers
dc.source.conferencedate8/09/1996
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access


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