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Carrier profile determination in device structures using AFM-based methods

dc.contributor.editorVandervorst, Wilfried
dc.contributor.editorDe Wolf, Peter
dc.contributor.editorClarysse, Trudo
dc.contributor.editorTrenkler, Thomas
dc.contributor.editorHellemans, L.
dc.contributor.editorSnauwaerts, Jan
dc.contributor.editorRaineri, Vito
dc.date.accessioned2021-09-29T15:58:48Z
dc.date.available2021-09-29T15:58:48Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1687
dc.sourceIIOimport
dc.titleCarrier profile determination in device structures using AFM-based methods
dc.typeBook chapter
dc.source.peerreviewno
dc.source.beginpage322
dc.source.bookSemiconductor Characterization: Present Status and Future Needs
dc.source.endpage326
imec.availabilityPublished - imec


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