Carrier profile determination in device structures using AFM-based methods

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Editors
Vandervorst, Wilfried; De Wolf, Peter; Clarysse, Trudo; Trenkler, Thomas; Hellemans, L.; Snauwaerts, Jan; Raineri, Vito
Book
Semiconductor Characterization: Present Status and Future Needs
Title
Carrier profile determination in device structures using AFM-based methods
Publication type
Book chapter
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