Publication:
Carrier profile determination in device structures using AFM-based methods
Date
| dc.contributor.editor | Vandervorst, Wilfried | |
| dc.contributor.editor | De Wolf, Peter | |
| dc.contributor.editor | Clarysse, Trudo | |
| dc.contributor.editor | Trenkler, Thomas | |
| dc.contributor.editor | Hellemans, L. | |
| dc.contributor.editor | Snauwaerts, Jan | |
| dc.contributor.editor | Raineri, Vito | |
| dc.date.accessioned | 2021-09-29T15:58:48Z | |
| dc.date.available | 2021-09-29T15:58:48Z | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1687 | |
| dc.source.beginpage | 322 | |
| dc.source.book | Semiconductor Characterization: Present Status and Future Needs | |
| dc.source.endpage | 326 | |
| dc.title | Carrier profile determination in device structures using AFM-based methods | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |