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dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.contributor.authorPfeffer, Markus
dc.contributor.authorSchellenberger, Martin
dc.contributor.authorNielsen, Peter
dc.contributor.authorThorsteinsson, Sune
dc.contributor.authorLin, Rong
dc.contributor.authorPetersen, Dirch
dc.date.accessioned2021-10-18T15:38:50Z
dc.date.available2021-10-18T15:38:50Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16890
dc.sourceIIOimport
dc.titlePhotovoltage versus microprobe sheet resistance measurements on ultrashallow structures
dc.typeJournal article
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageC1C8
dc.source.endpageC1C14
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume28
imec.availabilityPublished - open access


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