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Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.contributor.authorPfeffer, Markus
dc.contributor.authorSchellenberger, Martin
dc.contributor.authorNielsen, Peter
dc.contributor.authorThorsteinsson, Sune
dc.contributor.authorLin, Rong
dc.contributor.authorPetersen, Dirch
dc.date.accessioned2021-10-18T15:38:50Z
dc.date.available2021-10-18T15:38:50Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16890
dc.sourceIIOimport
dc.titlePhotovoltage versus microprobe sheet resistance measurements on ultrashallow structures
dc.typeJournal article
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageC1C8
dc.source.endpageC1C14
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume28
imec.availabilityPublished - open access


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