Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

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Authors

Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Bogdanowicz, Janusz; Vandervorst, Wilfried; Bender, Hugo; Pfeffer, Markus; Schellenberger, Martin; Nielsen, Peter; Thorsteinsson, Sune; Lin, Rong; Petersen, Dirch

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

28

Title

Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Publication type

Journal article

Embargo date

9999-12-31

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