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Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Publication:
Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Date
2010
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Moussa, Alain
;
Parmentier, Brigitte
;
Bogdanowicz, Janusz
;
Vandervorst, Wilfried
;
Bender, Hugo
;
Pfeffer, Markus
;
Schellenberger, Martin
;
Nielsen, Peter
;
Thorsteinsson, Sune
;
Lin, Rong
;
Petersen, Dirch
Journal
Journal of Vacuum Science and Technology B
Abstract
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1953
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1953
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations