Publication:

Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Date

2010
Journal article
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-6377-4199
cris.virtual.orcid0000-0002-7503-8922
cris.virtualsource.departmentfde8f386-0ddb-42e1-ad64-53cde7dda12d
cris.virtualsource.department9a3d60e7-3e8b-4366-b479-ea599b23d28b
cris.virtualsource.orcidfde8f386-0ddb-42e1-ad64-53cde7dda12d
cris.virtualsource.orcid9a3d60e7-3e8b-4366-b479-ea599b23d28b
dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.contributor.authorPfeffer, Markus
dc.contributor.authorSchellenberger, Martin
dc.contributor.authorNielsen, Peter
dc.contributor.authorThorsteinsson, Sune
dc.contributor.authorLin, Rong
dc.contributor.authorPetersen, Dirch
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned2021-10-18T15:38:50Z
dc.date.available2021-10-18T15:38:50Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16890
dc.source.beginpageC1C8
dc.source.endpageC1C14
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume28
dc.title

Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
18447.pdf
Size:
405.05 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles