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On the influence of the fitting algorithm on depth profiles reconstructed from AR-XPS data

dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMacak, Karol
dc.contributor.authorMishra, Gautam
dc.date.accessioned2021-10-18T15:40:57Z
dc.date.available2021-10-18T15:40:57Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16902
dc.sourceIIOimport
dc.titleOn the influence of the fitting algorithm on depth profiles reconstructed from AR-XPS data
dc.typeMeeting abstract
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conference59th IUVSTA Workshop on Surface Chemical Analysis
dc.source.conferencedate11/04/2010
dc.source.conferencelocationSalybia Trinidad & Tobago
imec.availabilityPublished - imec


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