dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Macak, Karol | |
dc.contributor.author | Mishra, Gautam | |
dc.date.accessioned | 2021-10-18T15:40:57Z | |
dc.date.available | 2021-10-18T15:40:57Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16902 | |
dc.source | IIOimport | |
dc.title | On the influence of the fitting algorithm on depth profiles reconstructed from AR-XPS data | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.source.peerreview | no | |
dc.source.conference | 59th IUVSTA Workshop on Surface Chemical Analysis | |
dc.source.conferencedate | 11/04/2010 | |
dc.source.conferencelocation | Salybia Trinidad & Tobago | |
imec.availability | Published - imec | |