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Use of optical and electrical measurement techniques throughout the MEMS device qualification process
Publication:
Use of optical and electrical measurement techniques throughout the MEMS device qualification process
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Coster, Jeroen
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Abstract
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1898
since deposited on 2021-10-18
Acq. date: 2026-01-10
Citations
Metrics
Views
1898
since deposited on 2021-10-18
Acq. date: 2026-01-10
Citations