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Applications of laser-Doppler vibrometry during MEMS device qualification

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-18T15:47:05Z
dc.date.available2021-10-18T15:47:05Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16939
dc.sourceIIOimport
dc.titleApplications of laser-Doppler vibrometry during MEMS device qualification
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage141
dc.source.endpage150
dc.source.conferenceOptical Measurement Techniques for Systems and Structures - OPTIMESS
dc.source.conferencedate25/05/2009
dc.source.conferencelocationAntwerpen Belgium
imec.availabilityPublished - imec


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