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The small-gap technique: understanding an ion-shading method for plasma-surface interactions study

dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorJarnac, Amelie
dc.contributor.authorConard, Thierry
dc.contributor.authorHendrickx, Dirk
dc.contributor.authorHuffman, Craig
dc.contributor.authorKunnen, Eddy
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorMilenin, Alexey
dc.contributor.authorShamiryan, Denis
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVandervorst, Alain
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorBoullart, Werner
dc.date.accessioned2021-10-18T15:49:14Z
dc.date.available2021-10-18T15:49:14Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16951
dc.sourceIIOimport
dc.titleThe small-gap technique: understanding an ion-shading method for plasma-surface interactions study
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHendrickx, Dirk
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference3rd International Plasma Etch and Strip for Microelectronics Workshop - PESM
dc.source.conferencedate5/03/2010
dc.source.conferencelocationGrenoble France
dc.identifier.urlhttp://imec-events.be/UserFiles/76/File/Presentations/S3/S3_PESM2010_JFdM.pdf
imec.availabilityPublished - open access


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