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MEMS test, yield and reliability

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-18T15:54:27Z
dc.date.available2021-10-18T15:54:27Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16980
dc.sourceIIOimport
dc.titleMEMS test, yield and reliability
dc.typeOral presentation
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate2/05/2010
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - imec
imec.internalnotesTutorial at IRPS2010


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