Three fast test methods used for large scale MEMS arrays
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Parton, Els | |
dc.date.accessioned | 2021-10-18T15:55:28Z | |
dc.date.available | 2021-10-18T15:55:28Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16986 | |
dc.source | IIOimport | |
dc.title | Three fast test methods used for large scale MEMS arrays | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Parton, Els | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.source.peerreview | no | |
dc.source.beginpage | 38 | |
dc.source.endpage | 40 | |
dc.source.journal | Semiconductor International China | |
dc.identifier.url | www.sichinamag.net | |
imec.availability | Published - imec | |
imec.internalnotes | Text in Chinese |
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