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Three fast test methods used for large scale MEMS arrays

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorParton, Els
dc.date.accessioned2021-10-18T15:55:28Z
dc.date.available2021-10-18T15:55:28Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16986
dc.sourceIIOimport
dc.titleThree fast test methods used for large scale MEMS arrays
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorParton, Els
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage38
dc.source.endpage40
dc.source.journalSemiconductor International China
dc.identifier.urlwww.sichinamag.net
imec.availabilityPublished - imec
imec.internalnotesText in Chinese


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