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Strain measurements in thin film structures by convergent beam electron diffraction

dc.contributor.authorArmigliato, A.
dc.contributor.authorBalboni, R.
dc.contributor.authorBenedetti, A.
dc.contributor.authorFrabboni, S.
dc.contributor.authorTixier, A.
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-30T07:54:48Z
dc.date.available2021-09-30T07:54:48Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1698
dc.sourceIIOimport
dc.titleStrain measurements in thin film structures by convergent beam electron diffraction
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2375
dc.source.endpage2381
dc.source.journalJournal de Physique III
dc.source.issue12
dc.source.volume7
imec.availabilityPublished - open access


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