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Influence of density on N-H bond stretch vibration in plasma enhanced chemical vapor deposited SiNx:H
Publication:
Influence of density on N-H bond stretch vibration in plasma enhanced chemical vapor deposited SiNx:H
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Date
2010-01
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dekkers, Harold
;
Pourtois, Geoffrey
;
Srinivasan, Nagendra Babu
Journal
Applied Physics Letters
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1784
since deposited on 2021-10-18
Acq. date: 2026-01-11
Citations
Metrics
Views
1784
since deposited on 2021-10-18
Acq. date: 2026-01-11
Citations