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Influence of density on N-H bond stretch vibration in plasma enhanced chemical vapor deposited SiNx:H

dc.contributor.authorDekkers, Harold
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorSrinivasan, Nagendra Babu
dc.date.accessioned2021-10-18T15:57:55Z
dc.date.available2021-10-18T15:57:55Z
dc.date.issued2010-01
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16999
dc.sourceIIOimport
dc.titleInfluence of density on N-H bond stretch vibration in plasma enhanced chemical vapor deposited SiNx:H
dc.typeJournal article
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.source.peerreviewyes
dc.source.beginpage11902
dc.source.journalApplied Physics Letters
dc.source.issue1
dc.source.volume96
imec.availabilityPublished - imec


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