Publication:

Integration and dielectric reliability of 30nm ½ pitch structures in Aurora® LK HM

Date

2010
Journal article
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Author(s)

Demuynck, Steven  
;
Huffman, Craig
;
Claes, Martine  
;
Suhard, Samuel  
;
Versluijs, Janko  
;
Volders, Henny  
;
Heylen, Nancy  
;
Kellens, Kristof  
;
Croes, Kristof  
;
Struyf, Herbert  
;
Vereecke, Guy  
;
Verdonck, Patrick  
;
De Roest, David  
;
Beynet, Julien
;
Sprey, Hessel  
;
Beyer, Gerald  

Journal

Japanese Journal of Applied Physics

Abstract

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