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Integration and dielectric reliability of 30nm ½ pitch structures in Aurora® LK HM

dc.contributor.authorDemuynck, Steven
dc.contributor.authorHuffman, Craig
dc.contributor.authorClaes, Martine
dc.contributor.authorSuhard, Samuel
dc.contributor.authorVersluijs, Janko
dc.contributor.authorVolders, Henny
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKellens, Kristof
dc.contributor.authorCroes, Kristof
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVereecke, Guy
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorDe Roest, David
dc.contributor.authorBeynet, Julien
dc.contributor.authorSprey, Hessel
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-18T16:00:05Z
dc.date.available2021-10-18T16:00:05Z
dc.date.issued2010
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17009
dc.sourceIIOimport
dc.titleIntegration and dielectric reliability of 30nm ½ pitch structures in Aurora® LK HM
dc.typeJournal article
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorSuhard, Samuel
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecStruyf, Herbert::0000-0002-6782-5424
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage04DB05
dc.source.journalJapanese Journal of Applied Physics
dc.source.issue4
dc.source.volume49
imec.availabilityPublished - imec


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