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Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation

dc.contributor.authorAugusto, Carlos
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-09-30T07:54:51Z
dc.date.available2021-09-30T07:54:51Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1700
dc.sourceIIOimport
dc.titleProposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation
dc.typeJournal article
dc.contributor.imecauthorDe Meyer, Kristin
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage254
dc.source.endpage258
dc.source.journalThin Solid Films
dc.source.volume294
imec.availabilityPublished - open access


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