Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation
dc.contributor.author | Augusto, Carlos | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-09-30T07:54:51Z | |
dc.date.available | 2021-09-30T07:54:51Z | |
dc.date.issued | 1997 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1700 | |
dc.source | IIOimport | |
dc.title | Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 254 | |
dc.source.endpage | 258 | |
dc.source.journal | Thin Solid Films | |
dc.source.volume | 294 | |
imec.availability | Published - open access |