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Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation
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Authors
Augusto, Carlos
;
De Meyer, Kristin
Journal
Thin Solid Films
Volume
294
Title
Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation
Publication type
Journal article
Embargo date
9999-12-31
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