Publication:

Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation

Date

1997
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorAugusto, Carlos
dc.contributor.authorDe Meyer, Kristin
dc.contributor.imecauthorDe Meyer, Kristin
dc.date.accessioned2021-09-30T07:54:51Z
dc.date.available2021-09-30T07:54:51Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1700
dc.source.beginpage254
dc.source.endpage258
dc.source.journalThin Solid Films
dc.source.volume294
dc.title

Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
1672.pdf
Size:
1.41 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles