Publication:
Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation
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1899 since deposited on 2021-09-30
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Acq. date: 2026-02-24
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1899 since deposited on 2021-09-30
1last month
1last week
Acq. date: 2026-02-24
Citations