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High density, low leakage back-end 3D capacitors for mixed signals applications

dc.contributor.authorDetalle, Mikael
dc.contributor.authorBarrenetxea, Mikel
dc.contributor.authorMuller, Philippe
dc.contributor.authorPotoms, Goedele
dc.contributor.authorPhommahaxay, Alain
dc.contributor.authorSoussan, Philippe
dc.contributor.authorVaesen, Kristof
dc.contributor.authorDe Raedt, Walter
dc.date.accessioned2021-10-18T16:00:58Z
dc.date.available2021-10-18T16:00:58Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17013
dc.sourceIIOimport
dc.titleHigh density, low leakage back-end 3D capacitors for mixed signals applications
dc.typeJournal article
dc.contributor.imecauthorDetalle, Mikael
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorPotoms, Goedele
dc.contributor.imecauthorPhommahaxay, Alain
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorVaesen, Kristof
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecVaesen, Kristof::0000-0001-9971-3593
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.source.peerreviewyes
dc.source.beginpage2571
dc.source.endpage2576
dc.source.journalMicroelectronic Engineering
dc.source.issue12
dc.source.volume87
dc.identifier.urlhttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V0W-50J9GPT-2&_user=799533&_coverDate=07%2F16%2F2010&_rdoc=1&_fmt=hig
imec.availabilityPublished - imec


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