dc.contributor.author | Detalle, Mikael | |
dc.contributor.author | Barrenetxea, Mikel | |
dc.contributor.author | Muller, Philippe | |
dc.contributor.author | Potoms, Goedele | |
dc.contributor.author | Phommahaxay, Alain | |
dc.contributor.author | Soussan, Philippe | |
dc.contributor.author | Vaesen, Kristof | |
dc.contributor.author | De Raedt, Walter | |
dc.date.accessioned | 2021-10-18T16:00:58Z | |
dc.date.available | 2021-10-18T16:00:58Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17013 | |
dc.source | IIOimport | |
dc.title | High density, low leakage back-end 3D capacitors for mixed signals applications | |
dc.type | Journal article | |
dc.contributor.imecauthor | Detalle, Mikael | |
dc.contributor.imecauthor | Muller, Philippe | |
dc.contributor.imecauthor | Potoms, Goedele | |
dc.contributor.imecauthor | Phommahaxay, Alain | |
dc.contributor.imecauthor | Soussan, Philippe | |
dc.contributor.imecauthor | Vaesen, Kristof | |
dc.contributor.imecauthor | De Raedt, Walter | |
dc.contributor.orcidimec | Soussan, Philippe::0000-0002-1347-6978 | |
dc.contributor.orcidimec | Vaesen, Kristof::0000-0001-9971-3593 | |
dc.contributor.orcidimec | De Raedt, Walter::0000-0002-7117-7976 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2571 | |
dc.source.endpage | 2576 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 12 | |
dc.source.volume | 87 | |
dc.identifier.url | http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V0W-50J9GPT-2&_user=799533&_coverDate=07%2F16%2F2010&_rdoc=1&_fmt=hig | |
imec.availability | Published - imec | |