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High density, low leakage back-end 3D capacitors for mixed signals applications
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Authors
Detalle, Mikael
;
Barrenetxea, Mikel
;
Muller, Philippe
;
Potoms, Goedele
;
Phommahaxay, Alain
;
Soussan, Philippe
;
Vaesen, Kristof
;
De Raedt, Walter
ISSN
0167-9317
Issue
12
Journal
Microelectronic Engineering
Volume
87
Title
High density, low leakage back-end 3D capacitors for mixed signals applications
Publication type
Journal article
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