Publication:

High density, low leakage back-end 3D capacitors for mixed signals applications

Date

2010
Journal article
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dc.contributor.authorDetalle, Mikael
dc.contributor.authorBarrenetxea, Mikel
dc.contributor.authorMuller, Philippe
dc.contributor.authorPotoms, Goedele
dc.contributor.authorPhommahaxay, Alain
dc.contributor.authorSoussan, Philippe
dc.contributor.authorVaesen, Kristof
dc.contributor.authorDe Raedt, Walter
dc.contributor.imecauthorDetalle, Mikael
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorPotoms, Goedele
dc.contributor.imecauthorPhommahaxay, Alain
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorVaesen, Kristof
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecVaesen, Kristof::0000-0001-9971-3593
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.date.accessioned2021-10-18T16:00:58Z
dc.date.available2021-10-18T16:00:58Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17013
dc.identifier.urlhttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V0W-50J9GPT-2&_user=799533&_coverDate=07%2F16%2F2010&_rdoc=1&_fmt=hig
dc.source.beginpage2571
dc.source.endpage2576
dc.source.issue12
dc.source.journalMicroelectronic Engineering
dc.source.volume87
dc.title

High density, low leakage back-end 3D capacitors for mixed signals applications

dc.typeJournal article
dspace.entity.typePublication
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